X-Ray Fluorescence Measuring Instrument with a Polycapillary X-Ray Optics for Automated Measurements and Analyses of Coating Thicknesses and Compositions on Very Small Components and Structures

The FISCHERSCOPE X-RAY XDV-μ is a universally applicable energy-dis persive xray measuring instrument. It is particularly well suited for non-destructive analyses and measurements of coating thicknesses on very small components and structures, even with complex coating systems.

Typical fields of application:

• Measurements on very small flat components and structures such as printed circuit boards, contacts or lead frames
• Analysis of very thin coatings, e.g., gold/palladium coatings of ≤ 0.1 μm (0.004 mils)
• Measurement of functional coatings in the electronics and semiconductor industries
• Determination of complex multi-coating systems
• Automated measurements, e.g., in quality control

To create ideal excitation conditions for every measurement, the XDV-μ features electrically changeable primary filters. The modern silicon drift detector achieves high accuracy and good detection sensitivity. Due to the innovative polycapillary x-ray optics, the instrument measures using an extremely small measurement spot yet with a very high excitation intensity.

The XDV-μ x-ray instrument has an excellent long-term stability, which among other things is reflected in a significantly reduced calibration effort. Using the fundamental parameter method, coating systems as well as solid and liquid samples can be analyzed standard-free. It is possible to detect up to 24 elements simultaneously. The FISCHERSCOPE X-RAY XDV-μ instrument is equipped with a high-precision, programmable X/Y-stage and an electrically driven Z-axis and is thus best suited for automated measurements. A high-resolution color video camera simplifies the precise determination of the measurement spot. The XDV-μ is designed for measuring and analyzing very thin coatings. With the programmable X/Y-stage and the tongue function for quick loading, it is optimally suited for automated sample measurements.

 

 

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